An autocollimator is a measuring device that applies a laser beam to a target, receives the reflected light beam with a camera, and measures the tilt of the object from the light receiving position without contact.
The autocollimator used visually can measure angles up to 0.5 minutes (0.15 mrad), and the electronically controlled autocollimator can measure up to 100 times the visual one.
Furthermore, you can measure very small substances because it can be measured without contact.
However, since measurement cannot be performed without reflecting light rays, it is necessary to either reflect the substance itself or install a reflective object such as a mirror on the target. It is usually used mainly for adjusting the position of parts and measuring distortion in optical and mechanical systems.
| Semiconductor How to mount a semiconductor chip in parallel on a package Solution Install TM-2070 in the mounter and measure tilt of the chip picked up by the handler. If it is within the specified value, it can be mounted. If not, status change to error. A reduction in defects can be expected.  | Processing Machine How to monitor and accurately adjust the orientation of optical components that make up a laser processing machine Solution By installing TM-2070 into the equipment, the component angle can be monitored. Since the status of the equipment can be grasped from the value, stable processing can be performed at all times.  |
| Measuring Machine How to maintain the installation state (angle) of the sample to be measured under same conditions in a device that uses light to measure the thickness and refractive index of a film such as an ellipsometer Solution By installing TM-2070 into the ellipsometer & adjusting the angle of the sample to be measured, it is possible to perform measurements under the same conditions, and stable measurement values can be expected.  | Measuring Equipment How to accurately adjust an optical components such as microscopes using X-rays Solution By installing TM-2070 into the equipment, monitoring and adjusting the component angles, stable measurement values can be expected  |
| Semiconductor Equipment How to monitor the orientation of a wafer during chucking on a semiconductor carrier Solution By installing TM-2070 into the equipment and monitoring the wafer angle, it is expected to prevent abnormalities and troubles such as wafer dropouts and chuck misalignment.  | Inspection Equipment To set the axis of the test chart Solution By checking and adjusting the angle between the test chart and the camera mounting surface with TM-2070, it is possible to align the chart axis. Stable inspection results can be expected by controlling the angle  |
