Vibration Isolation Workstations


DVID series is an ergonomic workstation with integrated workspace and pneumatic vibration isolators for mainly semiconductor, photonics and science metrology tools.  The comprehensive workstation consists of a shelf, armrest, cabinet, etc., providing an ergonomic workspace.  All optional accessories can be custom designed to individual specifications.  The workspace and the vibration isolated surface are separate to give an ergonomic workspace where users can place appliances or perform daily tasks.  Vibration isolation and damping efficiency vary with types of pneumatic isolators and equipment.  ISO-S isolator has the lower natural frequency meaning the ISO-S reduces low frequency vibrations more effectively but it is less table due to its softness.  ISO-S1 isolator is stiffer and its natural frequency is higher which indicates a stable system, and a greater load capacity but degraded vibration isolation performance.

Vibration Isolation Performance

Applications 

• Microscopy                            • Cell Injection       • Probe Station        • Thin Film Thickness Measurement             • Interferometry
• Optical Lithography             • Holography          • Mask Aligner          • Semiconductor / Display Inspection          • Micro Balance

White Light Interferometer

Confocal Microscope

Table SEM

Industrial Metrology Tools

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